Integrated circuit devices including a vertical field-effect transistor and methods of forming the same

ABSTRACT

Integrated circuit devices and methods of forming the same are provided. Integrated circuit devices may include a first active region including a first vertical field effect transistor (VFET), a second active region including a second VFET, and a diffusion break between the first active region and the second active region on a substrate. The diffusion break may include first and second isolation layers in the substrate and a diffusion break channel region protruding from a portion of the substrate. The portion of the substrate may be between the first isolation layer and the second isolation layer. In some embodiments, the first and second isolation layers may be adjacent to respective opposing sidewalls of the diffusion break channel region.

CROSS-REFERENCE TO RELATED APPLICATION

This application claims priority to U.S. Provisional Application Ser.No. 63/062,668, entitled DIFFUSION BREAK USING VERTICAL FIELD EFFECTTRANSISTOR, filed in the USPTO on Aug. 7, 2020, the disclosure of whichis hereby incorporated by reference herein in its entirety.

FIELD

The present disclosure generally relates to the field of electronicsand, more particularly, to vertical field-effect transistor (VFET)devices.

BACKGROUND

Various structures and manufacturing processes of VFET devices have beenresearched because of their high scalability. Therefore, developingmanufacturing processes that improve performance and/or reliability ofVFET devices may be beneficial.

SUMMARY

According to some embodiments of the inventive concept, integratedcircuit devices may include a first active region including a firstvertical field effect transistor (VFET), a second active regionincluding a second VFET, and a diffusion break between the first activeregion and the second active region on a substrate. The diffusion breakmay include first and second isolation layers in the substrate and adiffusion break channel region protruding from a portion of thesubstrate. The portion of the substrate may be between the firstisolation layer and the second isolation layer. In some embodiments, thefirst and second isolation layers may be adjacent to respective opposingsidewalls of the diffusion break channel region.

According to some embodiments of the present inventive concept,integrated circuit devices may include a first active region and asecond active region that are on a substrate and are spaced apart fromeach other in a first direction. The first active region may include afirst vertical field effect transistor (VFET), and the second activeregion may include a second VFET. The integrated circuit devices mayalso include a first isolation layer in the substrate, a dummy channelregion on the substrate, and a second isolation layer in the substrate.The first isolation layer, the dummy channel region, and the secondisolation layer may be sequentially arranged in the first direction in aplan view.

According to some embodiments of the present inventive concept,integrated circuit devices may include a first active region and asecond active region on a substrate. The first active region may includea first channel region protruding from the substrate and a first topsource/drain region on the first channel region. The integrated circuitdevices may also include a first isolation layer and a second isolationlayer in the substrate between the first active region and the secondactive region, a second channel region protruding from the substrate andbeing between the first isolation layer and the second isolation layer,and an insulating layer on the second channel region. The insulatinglayer may contact an entirety of an upper surface of the second channelregion.

According to some embodiments of the present inventive concept, methodsof forming an integrated circuit device may include forming first,second and third channel regions on a substrate. Each of the first,second and third channel regions may protrude from the substrate, andthe first, second and third channel regions may be sequentially arrangedin a first direction. The methods may also include forming first andsecond bottom source/drain regions in the substrate and forming firstand second isolation layers in the substrate. The first bottomsource/drain region may be between the first and second channel regionsin a plan view, and the second bottom source/drain region may be betweenthe second and third channel regions in the plan view. A portion of thefirst isolation layer may be in the first bottom source/drain region,and a portion of the second isolation layer may be in the second bottomsource/drain region. Further, the methods may include forming first andsecond top source/drain regions on the first and third channel regions,respectively.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic layout of an integrated circuit device accordingto some embodiments of the inventive concept.

FIGS. 2 and 3 are cross-sectional views of an integrated circuit devicetaken along the line A-A′ of FIG. 1 according to some embodiments of theinventive concept.

FIGS. 4 and 5 are cross-sectional views of an integrated circuit devicetaken along the line B-B′ of FIG. 1 according to some embodiments of theinventive concept.

FIG. 6 is a flow chart of methods of forming an integrated circuitdevice according to some embodiments of the inventive concept.

FIGS. 7 through 10 are cross-sectional views, taken along the line A-A′of FIG. 1, illustrating a method of forming an integrated circuit deviceaccording to some embodiments of the inventive concept.

DETAILED DESCRIPTION

An integrated circuit device may include a diffusion break toelectrically isolate transistors of separate active regions. When adiffusion break includes a single isolation layer having a width greaterthan a channel pitch, the diffusion break may have a pattern densitylower than a pattern density of an active region, and defects caused bythe lower pattern density may occur during a fabrication process (e.g.,an etch process, a chemical mechanical polishing (CMP) process, or alithography process). Further, when the diffusion break includes thesingle isolation layer, the diffusion break may have properties (e.g., adegree of heat adsorption and/or type and extent of stress) differentfrom properties of the active region, and the difference in thoseproperties may make a local layout effect (LLE) complications and maylead to defects.

FIG. 1 is a schematic layout of an integrated circuit device accordingto some embodiments of the inventive concept. FIG. 2 is across-sectional view of the integrated circuit device taken along theline A-A′ of FIG. 1 according to some embodiments of the inventiveconcept.

Referring to FIGS. 1 and 2, the integrated circuit device may includemultiple active regions (e.g., a first active region 120_1, a secondactive region 120_2, and a third active region 120_3) on a substrate100. The first active region 120_1, the second active region 120_2, andthe third active region 120_3 are spaced apart from each other and arearranged in a first direction D1. Each of the first active region 120_1,the second active region 120_2, and the third active region 120_3 mayextend in a second direction D2. As used herein, “an element A extendsin a direction X” (or similar language) may mean that the element Aextends longitudinally in the direction X.

The first direction D1 and the second direction D2 may be perpendicularto each other. The first direction D1 and the second direction D2 maybe, respectively, a first horizontal direction and a second horizontaldirection. The substrate 100 may include, for example, one or moresemiconductor materials (e.g., Si, Ge, SiGe, GaP, GaAs, SiC, SiGeCand/or InP). In some embodiments, the substrate 100 may be a bulksubstrate (e.g., a bulk silicon substrate) or a semiconductor oninsulator (SOI) substrate.

In some embodiments, each of the first active region 120_1, the secondactive region 120_2, and the third active region 120_3 may be a standardcell. The standard cells may be, for example, an inverter, a 2-inputNAND gate, a 3-input NAND gate, a 2-input NOR gate, a 3-input NOR gate,an And-Or inverter (AOI), an Or-And inverter (OAI), an XNOR gate, an XORgate, a multiplexer (MUX), a latch, or a D-flip-flop.

Each of the first active region 120_1, the second active region 120_2,and the third active region 120_3 may include at least one channelregion 12 protruding from the substrate 100 in a third direction D3. Thethird direction D3 may be perpendicular to both the first direction D1and the second direction D2 and may be a vertical direction. AlthoughFIG. 1 illustrates that each of the first active region 120_1, thesecond active region 120_2, and the third active region 120_3 includesfour channel regions 12 arranged in a specific pattern, the inventiveconcept is not limited thereto. In some embodiments, each of the firstactive region 120_1, the second active region 120_2, and the thirdactive region 120_3 may include single channel region 12 or two or morechannel regions 12 arranged in a pattern different from the specificpattern illustrated in FIG. 1.

A first diffusion break 140_1 may be provided between the first activeregion 120_1 and the second active region 120_2 to electrically isolatethe first active region 120_1 and the second active region 120_2 fromeach other. A second diffusion break 140_2 may be provided between thesecond active region 120_2 and the third active region 120_3 toelectrically isolate the second active region 120_2 and the third activeregion 120_3 from each other.

Each of the first diffusion break 140_1 and the second diffusion break140_2 may include at least one diffusion break channel region 12 d. Thefirst diffusion break 140_1 may include a single diffusion break channelregion 12 d between the first active region 120_1 and the second activeregion 120_2 in the first direction D1 as illustrated in FIG. 1 and maybe a single diffusion break (SDB). The second diffusion break 140_2 mayinclude two diffusion break channel regions 12 d arranged and aligned inthe first direction D1 between the second active region 120_2, and thethird active region 120_3 in the first direction D1 as illustrated inFIG. 1 and may be a double diffusion break (DDB).

It is noted that the present inventive concept is not limited to thenumber of the diffusion break channel regions 12 d in the firstdiffusion break 140_1 or the second diffusion break 140_2 illustrated inFIG. 1. In some embodiments, the first diffusion break 140_1 and/or thesecond diffusion break 140_2 may include more than three diffusion breakchannel regions 12 d arranged and aligned in the first direction D1.

Still referring to FIGS. 1 and 2, the channel region 12 may have a firstwidth w1 in the first direction D1, the diffusion break channel region12 d may have a second width w2 in the first direction D1, and the firstwidth w1 may be equal to the second width w2. For example, the firstwidth w1 may be about 10 nm.

The channel regions 12 on a single active region (e.g., the first activeregion 120_1) may be spaced apart from each other by a first distance d1in the first direction D1, the diffusion break channel region 12 d andthe closest channel region 12 may be spaced apart from each other by asecond distance d2 in the first direction D1, and the first distance d1may be equal to the second distance d2. In some embodiments, uppersurfaces of the channel regions 12 may be coplanar with an upper surfaceof the diffusion break channel region 12 d as illustrated in FIG. 1.

Although FIG. 2 illustrates that each of the channel regions 12 and thediffusion break channel region 12 d has a vertical sidewall and has auniform width along the third direction D3, the inventive concept is notlimited thereto. In some embodiments, one of the channel regions 12 andthe diffusion break channel region 12 d may have a slanted sidewall andmay have a varying width along the third direction D3. When one of thechannel regions 12 and the diffusion break channel region 12 d has aslanted sidewall, the first width w1 and/or the second width w2 may be awidth of a lower surface of the channel region 12 or the diffusion breakchannel region 12 d. The lower surface of the channel region 12 or thediffusion break channel region 12 d may contact the substrate 100.Further, the first distance d1 and the second distance d2 may bemeasured with reference to the lower surface of the channel region 12and/or the lower surface of the diffusion break channel region 12 d.

Referring to FIG. 2, a gate dielectric layer 24 and a gate electrodelayer 26 may be provided on a sidewall of each of the channel regions 12and the diffusion break channel region 12 d. A bottom source/drainregion 14 may be provided in the substrate 100 adjacent a lower surfaceof each of the channel regions 12, and a top source/drain region 34 maybe provided on an upper surface of each of the channel regions 12. Thetop source/drain region 34 may contact the upper surface of the channelregion 12. Each bottom source/drain region 14 and each top source/drainregion 34 may include an impurity element (e.g., B, Al, Ga, P and/orAs). The channel region 12, the bottom source/drain region 14, the topsource/drain region 34, the gate dielectric layer 24, and the gateelectrode layer 26 may constitute a VFET.

The gate dielectric layer 24 may include, for example, silicon oxideand/or a high-k material (e.g., hafnium oxide or aluminum oxide). Thegate electrode layer 26 may include a conductive layer including, forexample, metal (e.g., W, Ti, Cu, and/or Co) or doped semiconductormaterial. The gate electrode layer 26 may include multiple layerssequentially stacked on the gate dielectric layer 24 and may include awork function layer and a conductive layer. The work function layer mayinclude, for example, metal nitride (e.g., TiN, TiAlN, TaAlN), TiAl,TaC, TiC, or HfSi.

A lower spacer layer 22 may be provided between the bottom source/drainregion 14 and the gate electrode layer 26 for electrical isolationtherebetween. An upper spacer layer 32 may be provided between the gateelectrode layer 26 and the top source/drain region 34 for electricalisolation therebetween. Each of the lower spacer layer 22 and the upperspacer layer 32 may include an insulating material, for example, SiNand/or SiON.

The first diffusion break 140_1 may include two isolation layers 16 inthe substrate 100 adjacent opposing sidewalls of the diffusion breakchannel region 12 d, respectively. The isolation layer 16 may include aninsulating material, such as silicon oxide. A first isolation layer 16of the two isolation layers 16 may contact a sidewall of the firstactive region 120_1, and a second isolation layer 16 of the twoisolation layers 16 may contact a sidewall of the second active region120_2.

A diffusion break bottom source/drain region 14 d may be provided in thesubstrate 100 adjacent a sidewall of the diffusion break channel region12 d. The diffusion break bottom source/drain region 14 d may include animpurity element that is the same as the impurity element of the bottomsource/drain regions 14. A size of the diffusion break bottomsource/drain region 14 d may not be large enough to function as asource/drain region of a transistor, and the diffusion break bottomsource/drain region 14 d may be a dummy bottom source/drain region. Theisolation layer 16 may contact a sidewall of the diffusion break bottomsource/drain region 14 d. In some embodiments, the diffusion breakbottom source/drain region 14 d may be omitted.

As illustrated in FIG. 2, the diffusion break channel region 12 d andthe closest channel region 12 may define a gap therebetween, and the gaphas a first center C_1 in the first direction D1. The upper surface 16 uhas a second center C_2 in the first direction D1, and the first centerC_1 may be offset toward the closest channel region 12 from the secondcenter C_2 in the first direction D1.

In some embodiments, a top source/drain region may not be provided onthe diffusion break channel region 12 d, as illustrated in FIG. 2. Aninsulating layer 42 provided on the top source/drain regions 34 maycontact an entirety of an upper surface of the diffusion break channelregion 12 d. As a top source/drain region is not provided on thediffusion break channel region 12 d, a current does not flow through thediffusion break channel region 12 d when the gate electrode layer 26 onthe diffusion break channel region 12 d is biased. Accordingly, thediffusion break channel region 12 d may be a dummy channel region.

FIG. 3 is a cross-sectional view of an integrated circuit device takenalong the line A-A′ of FIG. 1 according to some embodiments of theinventive concept. Referring to FIG. 3, a diffusion break topsource/drain region 34 d may be provided on the diffusion break channelregion 12 d. The diffusion break top source/drain region 34 d may bemuch smaller than the top source/drain region 34. For example, the topsource/drain region 34 may have a fourth width w4 in the first directionD1, the diffusion break top source/drain region 34 d may have a fifthwidth w5 in the first direction D1, and the fifth width w5 may be atmost 0.8 times the fourth width w4. In some embodiments, the fifth widthw5 may be less than 0.5 times the fourth width w4.

A size of the diffusion break top source/drain region 34 d may not belarge enough to function as a top source/drain region of a transistor,and the diffusion break top source/drain region 34 d may be a dummy topsource/drain region. A small size of the diffusion break topsource/drain region 34 d may help to maintain electrical isolationbetween the diffusion break top source/drain region 34 d and an adjacenttop source/drain 34 and thus may reduce the possibility of defectscaused by electrical short between the diffusion break top source/drainregion 34 d and the adjacent top source/drain 34.

The isolation layer 16 may include an upper surface 16 u that may have athird width w3 in the first direction D1 that may be narrower than thesecond distance d2 shown in FIG. 2 between the diffusion break channelregion 12 d and the closest channel region 12 in the first direction D1.For example, the third width w3 may be about 21 nm.

FIG. 4 is a cross-sectional view of an integrated circuit device takenalong the line B-B′ of FIG. 1 according to some embodiments of theinventive concept. FIG. 4 bears some similarity to FIGS. 2 and 3, andsimilar components are labeled with similar reference numbers. Referringto FIG. 4, the second diffusion break 140_2 may include two diffusionbreak channel regions 12 d that protrude from the substrate 100 and arearranged and aligned in the first direction D1. Referring to FIGS. 1 and4, the two diffusion break channel regions 12 d may be between twoisolation layers 16. Further, an additional isolation layer 16 may beprovided between the two diffusion break channel regions 12 d.

Although FIG. 4 illustrates that diffusion break top source/drainregions 34 d are provided on the two diffusion break channel regions 12d, in some embodiments, the diffusion break top source/drain regions 34d may be omitted, and the insulating layer 42 may contact an entirety ofan upper surface of each of the two diffusion break channel regions 12d. Further, although FIG. 4 illustrates that the second diffusion break140_2 includes diffusion break bottom source/drain regions 14 d, in someembodiments, the diffusion break bottom source/drain regions 14 d may beomitted.

FIG. 5 is a cross-sectional view of an integrated circuit device takenalong the line B-B′ of FIG. 1 according to some embodiments of theinventive concept. FIG. 5 bears some similarity to FIGS. 2, 3, and 4,and similar components are labeled with similar reference numbers.Referring to FIG. 5, an isolation layer 16 may not be provided in thesubstrate 100 between the two diffusion break channel regions 12 d, anda single diffusion break bottom source/drain region 14 d may be providedin the substrate 100 between the two diffusion break channel regions 12d.

FIG. 6 is a flow chart of methods of forming an integrated circuitdevice according to some embodiments of the inventive concept. FIGS. 7through 10 are cross-sectional views, taken along the line A-A′ of FIG.1, illustrating a method of forming an integrated circuit deviceaccording to some embodiments of the inventive concept.

Referring to FIGS. 6 and 7, the methods may include forming channelregions (e.g., channel regions 12 and a diffusion break channel region12 d) on a substrate 100 (Block 610). For example, the channel regionsmay be formed by etching the substrate 100 using channel mask layers 11as an etch mask. The channel mask layers 11 may include, for example, aphoto resist material, a hard mask material, and/or a silicon layerincluding nitrogen and/or oxygen. Although FIG. 7 illustrates thechannel mask layer 11 is a single layer, in some embodiments, thechannel mask layer 11 may include multiple layers sequentially stackedin the third direction D3.

Bottom source/drain regions 14 may be formed in the substrate 100 (Block620). The bottom source/drain regions 14 may be formed by adding animpurity element into portions of the substrate 100 using, for example,an ion implantation process.

Referring FIG. 8, a liner layer 13, a first mask layer 15, and a secondmask layer 17 may be sequentially formed on the channel regions 12 andthe diffusion break channel region 12 d. In some embodiments, the linerlayer 13 may be formed conformally on the channel regions 12 and thediffusion break channel region 12 d and may have a uniform thickness onthe channel regions 12 and the diffusion break channel region 12 d. Eachof the liner layer 13, the first mask layer 15, and the second masklayer 17 may include a material having an etch selectivity with respectto the substrate 100. Each of the liner layer 13, the first mask layer15, and the second mask layer 17 may include, for example, a photoresist material, a hard mask material, and/or a silicon layer includingnitrogen and/or oxygen.

An opening of the second mask layer 17 may have a third center C_3 inthe first direction D1 that may be offset toward the diffusion breakchannel region 12 d from the first center C_1 such that, after forming atrench (e.g., a trench 10 in FIG. 9), a remaining portion of the bottomsource/drain regions 14 adjacent the channel region 12 may be biggerthan a diffusion break bottom source/drain region (e.g., a diffusionbreak bottom source/drain region 14 d in FIG. 9).

Referring to FIG. 9, trenches 10 may be formed in the substrate 100 byetching the substrate 100 using the liner layer 13, the first mask layer15, and the second mask layer 17 as an etch mask. The trenches 10 may beformed by etching the first mask layer 15 using the second mask layer 17as an etch mask and then etching the substrate 100. In some embodiments,the liner layer 13 on opposing sidewalls of the diffusion break channelregion 12 d may be exposed while etching the first mask layer 15 asillustrated in FIG. 9.

Referring to FIGS. 6 and 10, isolation layers 16 may be formed in thetrenches 10, respectively (Block 630). The channel mask layer 11, theliner layer 13, the first mask layer 15, and the second mask layer 17 ofFIG. 9 may be removed to expose upper surfaces of the channel regions 12and the diffusion break channel region 12 d. A lower spacer layer 22 maybe formed on the substrate 100, and then a gate structure including agate dielectric layer 24 and a gate electrode layer 26 may be formed ona side of each of the channel regions 12 and the diffusion break channelregion 12 d (Block 640). An upper spacer layer 32 may be formed on thegate structures.

An inhibition layer 33 may be formed on the diffusion break channelregion 12 d (Block 650). The inhibition layer 33 may cover an entiretyof an upper surface of the diffusion break channel region 12 d asillustrated in FIG. 10. The inhibition layer 33 may include nitrideand/or oxide and may inhibit formation of a top source/drain region onthe diffusion break channel region 12 d.

Top source/drain regions 34 may be formed on the channel regions 12(Block 660) by, for example, an epitaxial growth process using thechannel regions 12 as a seed layer. As the inhibition layer 33 coversthe diffusion break channel region 12 d, an epitaxial layer may not begrown on the diffusion break channel region 12 d, as illustrated in FIG.2, or a small epitaxial layer may be formed on the diffusion breakchannel region 12 d, as illustrated in FIG. 3.

The second diffusion break 140_2 illustrated in FIGS. 4 and 5 may beformed by changing a number and widths of openings of the second masklayer 17 illustrated in FIG. 8.

Example embodiments are described below with reference to theaccompanying drawings. Many different forms and embodiments are possiblewithout deviating from the spirit and teachings of this disclosure andso the disclosure should not be construed as limited to the exampleembodiments set forth herein. Rather, these example embodiments areprovided so that this disclosure will be thorough and complete and willconvey the scope of the disclosure to those skilled in the art. In thedrawings, the sizes and relative sizes of layers and regions may beexaggerated for clarity. Like reference numbers refer to like elementsthroughout.

Example embodiments of the present inventive concept are describedherein with reference to cross-sectional views or plan views that areschematic illustrations of idealized embodiments and intermediatestructures of example embodiments. As such, variations from the shapesof the illustrations as a result, for example, of manufacturingtechniques and/or tolerances, are to be expected. Thus, exampleembodiments of the present inventive concept should not be construed aslimited to the particular shapes illustrated herein but includedeviations in shapes that result, for example, from manufacturing.

Unless otherwise defined, all terms (including technical and scientificterms) used herein have the same meaning as commonly understood by oneof ordinary skill in the art to which the present inventive conceptbelongs. It will be further understood that terms, such as those definedin commonly used dictionaries, should be interpreted as having a meaningthat is consistent with their meaning in the context of the relevant artand will not be interpreted in an idealized or overly formal senseunless expressly so defined herein.

The terminology used herein is for the purpose of describing particularembodiments only and is not intended to be limiting of the presentinventive concept. As used herein, the singular forms “a,” “an” and“the” are intended to include the plural forms as well, unless thecontext clearly indicates otherwise. It will be further understood thatthe terms “comprises,” “comprising,” “includes” and/or “including,” whenused in this specification, specify the presence of the stated features,steps, operations, elements and/or components, but do not preclude thepresence or addition of one or more other features, steps, operations,elements, components and/or groups thereof. As used herein the term“and/or” includes any and all combinations of one or more of theassociated listed items.

It will be understood that references herein to “an element A verticallyoverlapping an element B” (or similar language) means that a verticalline intersecting both the elements A and B exists. It will beunderstood that although the terms first, second, etc. may be usedherein to describe various elements, these elements should not belimited by these terms. These terms are only used to distinguish oneelement from another. Thus, a first element could be termed a secondelement without departing from the teachings of the present inventiveconcept.

It should be noted that in some alternate implementations, thefunctions/acts noted in flowchart blocks herein may occur out of theorder noted in the flowcharts. For example, two blocks shown insuccession may in fact be executed substantially concurrently or theblocks may sometimes be executed in the reverse order, depending uponthe functionality/acts involved. Moreover, the functionality of a givenblock of the flowcharts and/or block diagrams may be separated intomultiple blocks and/or the functionality of two or more blocks of theflowcharts and/or block diagrams may be at least partially integrated.Finally, other blocks may be added/inserted between the blocks that areillustrated, and/or blocks/operations may be omitted without departingfrom the scope of the present inventive concept.

The above-disclosed subject matter is to be considered illustrative, andnot restrictive, and the appended claims are intended to cover all suchmodifications, enhancements, and other embodiments, which fall withinthe true spirit and scope of the inventive concept. Thus, to the maximumextent allowed by law, the scope is to be determined by the broadestpermissible interpretation of the following claims and theirequivalents, and shall not be restricted or limited by the foregoingdetailed description.

What is claimed is:
 1. An integrated circuit device comprising: a firstactive region and a second active region on a substrate, the firstactive region comprising a first vertical field effect transistor (VFET)and the second active region comprising a second VFET; and a diffusionbreak between the first active region and the second active region,wherein the diffusion break comprises: a first isolation layer and asecond isolation layer in the substrate; and a diffusion break channelregion protruding from a portion of the substrate, wherein the portionof the substrate is between the first isolation layer and the secondisolation layer.
 2. The integrated circuit device of claim 1, whereinthe first VFET comprises a first channel region protruding from thesubstrate and a first top source/drain region on the first channelregion, and wherein the integrated circuit device further comprises aninsulating layer on the diffusion break channel region, and theinsulating layer contacts an entirety of an upper surface of thediffusion break channel region.
 3. The integrated circuit device ofclaim 1, wherein the first VFET comprises a first channel regionprotruding from the substrate and a first top source/drain region thatis on the first channel region and has a first width, and the diffusionbreak further comprises a diffusion break top source/drain region thatis on the diffusion break channel region and has a second width, and thesecond width is at most 0.8 times the first width.
 4. The integratedcircuit device of claim 1, wherein the first VFET comprises two firstVFETs that comprise respective first and second channel regionsprotruding from the substrate, and the first and second channel regionsare spaced apart from each other by a first distance, and the firstchannel region and the diffusion break channel region are spaced apartfrom each other by a second distance that is equal to the firstdistance.
 5. The integrated circuit device of claim 4, wherein uppersurfaces of the first and second channel regions are coplanar with anupper surface of the diffusion break channel region.
 6. The integratedcircuit device of claim 1, wherein the first isolation layer contacts atleast a portion of a sidewall of the first active region.
 7. Theintegrated circuit device of claim 1, wherein the first VFET comprises afirst channel region protruding from the substrate, and the firstisolation layer comprises an upper surface having a width that is notgreater than a distance between the first channel region and thediffusion break channel region.
 8. The integrated circuit device ofclaim 1, wherein the first VFET comprises a first channel regionprotruding from the substrate, and the first isolation layer contacts atleast a portion of a sidewall of the first active region, and the firstchannel region and the diffusion break channel region define a first gaptherebetween, and a first center of the first gap is offset toward thefirst channel region from a second center of an upper surface of thefirst isolation layer.
 9. The integrated circuit device of claim 1,wherein the first VFET comprises a first channel region protruding fromthe substrate, and the first channel region and the diffusion breakchannel region have an equal width.
 10. The integrated circuit device ofclaim 1, wherein the diffusion break channel region comprises a firstdiffusion break channel region and a second diffusion break channelregion that protrude from the substrate, and the first and seconddiffusion break channel regions are between the first isolation layerand the second isolation layer in a plan view.
 11. The integratedcircuit device of claim 10, further comprising a third isolation layerthat is between the first and second diffusion break channel regions inthe plan view.
 12. An integrated circuit device comprising: a firstactive region and a second active region that are on a substrate and arespaced apart from each other in a first direction, the first activeregion comprising a first vertical field effect transistor (VFET) andthe second active region comprising a second VFET; and a first isolationlayer in the substrate; a dummy channel region on the substrate; and asecond isolation layer in the substrate, wherein the first isolationlayer, the dummy channel region, and the second isolation layer aresequentially arranged in the first direction in a plan view.
 13. Theintegrated circuit device of claim 12, wherein the first VFET comprisesa first channel region protruding from the substrate and a first topsource/drain region that is on the first channel region and has a firstwidth in the first direction, and the integrated circuit device furthercomprises a dummy top source/drain region that is on the dummy channelregion and has a second width in the first direction, and the secondwidth is at most 0.8 times the first width.
 14. The integrated circuitdevice of claim 12, wherein the first VFET comprises two first VFETsthat comprise respective first and second channel regions protrudingfrom the substrate, and the first and second channel regions are spacedapart from each other by a first distance, and the first channel regionand the dummy channel region are spaced apart from each other by asecond distance that is equal to the first distance.
 15. The integratedcircuit device of claim 12, wherein the first VFET comprises a firstchannel region protruding from the substrate, and the first isolationlayer contacts at least a portion of a sidewall of the first activeregion, and the first isolation layer comprises an upper surface havinga width that is not greater than a distance between the first channelregion and the dummy channel region.
 16. The integrated circuit deviceof claim 12, wherein the first isolation layer contacts at least aportion of a sidewall of the first active region, and the secondisolation layer contacts at least a portion of a sidewall of the secondactive region.
 17. A method of forming an integrated circuit device, themethod comprising: forming first, second and third channel regions on asubstrate, wherein the first, second and third channel regions eachprotrudes from the substrate and are sequentially arranged in a firstdirection; forming first and second bottom source/drain regions in thesubstrate, wherein the first bottom source/drain region is between thefirst and second channel regions in a plan view, and the second bottomsource/drain region is between the second and third channel regions inthe plan view; forming first and second isolation layers in thesubstrate, wherein a portion of the first isolation layer is in thefirst bottom source/drain region, and a portion of the second isolationlayer is in the second bottom source/drain region; and then formingfirst and second top source/drain regions on the first and third channelregions, respectively.
 18. The method of claim 17, wherein forming thefirst and second isolation layers comprises: forming a first trench inthe substrate by removing a portion of the first bottom source/drainregion and a second trench in the substrate by removing a portion of thesecond bottom source/drain region; and forming the first and secondisolation layers in the first and the second trenches, respectively. 19.The method of claim 18, further comprising: forming a liner layerconformally on the second channel region; forming a mask layer on theliner layer, wherein the mask layer comprises a first portionoverlapping the portion of the first bottom source/drain region and asecond portion overlapping the portion of the second bottom source/drainregion; and removing the first portion of the mask layer and the secondportion of the mask layer, where removing the first and second portionsof the mask layer exposes the liner layer.
 20. The method of claim 17,further comprising: forming an inhibition layer contacting an uppersurface of the second channel region before forming the first and secondtop source/drain regions, wherein forming the first and second topsource/drain regions comprises growing the first and second topsource/drain regions using an epitaxial growth process.